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Model		TM04-50	TM04-100	TM04-150	TM04-200	TM04-300
Structure	Travel	50mm	100mm	150mm	200mm	300mm
	Table Size	90mm×90mm			120mm×120mm
	Drive System	Ball Screw
	Screw Pitch	4mm
	Guide Rail	Linear Ball Bearing
	Standard Motor	NEMA17 Step Motor
	Base Material	Aluminum Alloy
	Surface Treatment	Black Anodized
	Load Capacity	15Kg	15Kg	10Kg	7 Kg	5Kg
	Weight	2.8Kg	3.4Kg	4.5Kg	5.2Kg	6.3Kg
	Linear Grating	Optional
	Servo Motor	Optional
	Dustproof Cover	Optional
Accuracy	Resolution	20μ (Non Micro-Stepping)
		1μ (20 Micro-Stepping)
	Maximum Speed	40mm /sec
	Repeatability	3μ
	Positional Accuracy	5μ
	Straightness	5µ	6µ	6µ	8µ	8µ
	Driving Parallelism	10µ	15µ	15µ	20µ	20µ
	Pitch	25″	50″	50″	60″	60″
	Yaw	20″	25″	25″	30″	30″
	Lost Motion	3µ	3µ	5µ	5µ	5µ

Feature

1) Non-contact direct-drive system ensures ultraprecision motion with high dynamics and reliability

2) Extra-large, high-efficiency linear motor minimizes heat generation

3) Ironless moving coil has no cogging for ultra smooth velocity control

4) Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration

5) High precision glass scale encoder provides accurate position feedback with 50 nm repeatability

6) Sub-nm resolution with low interpolation error for outstanding speed stability and motion sensitivity

7) No moving cables inside the stage, reduced particle generation and improved reliability